National and Kapodistrian University of Athens Semiconductor and Microsystems Laboratory Solid State Physics Section Department of Solid State Physics Department of Solid State Physics, Faculty of Physics, University of Athens University of Athens, School of Science, Faculty of Physics, Department of Solid State Physics, Contact, Maps Penepistimiopolis Zografos, Athens 15784 | Phone: +30 210 7276-722 | Fax: +30 210 7276-711 Semiconducting Materials Semiconductor Devices MEMS Nanocomposites Reliability     Materials and     Transport parameters     Point defects     Dielectric films Micro-Electro-Mechanical System Switches (MEMS) Experimental setup The experimental setup consists of: *  Boonton 72 capacitance meters with resolution of the order of 0.1fF *  Keithley 6485, 6487 and 6517A pico-Amperemeters for current-voltage  characterization and bias supply *  Probe station with Cascade micromanipulators in dark box for on wafer assessment * Kelvin Probe setup for assessment of dielectric film surface potential or MIM capacitor top electrode potential *  Cascade Microtech RF-1 probe station with Pico-Probe CPW probes *  Aeroflex 2397 spectrum analyser with tracking generator *  HP bias-T networks *  Return-loss bridges for rf-assessment up to 3 GHz. *  High voltage ammplifier with +110 Volt compliance and fast response for MEMS cycling lifetime test *  All measurements are computer controlled with Labview software. Cascade Microtech RF-1 probe station with signal generator, high voltage amplifier and spectrum analyser Cryostat (100K - 450K) with MEMS capacitive switches on silicon substrate die Kelvin Probe setup back MEMS tested at different temperatures