National and Kapodistrian University of Athens Semiconductor and Microsystems Laboratory Solid State Physics Section Department of Solid State Physics Department of Solid State Physics, Faculty of Physics, University of Athens University of Athens, School of Science, Faculty of Physics, Department of Solid State Physics, Contact, Maps Penepistimiopolis Zografos, Athens 15784 | Phone: +30 210 7276-722 | Fax: +30 210 7276-711 Recent Journal publications 1. “Assessment of dielectric charging in capacitive MEMS switches fabricated on Si substrate with thin oxide film”, Microelectronic Engineering 159, pp. 209-214 (2016).   2. “Conduction mechanisms in conductive multi-walled carbon nanotube filled polydimethylsiloxane nanocomposites”, Microelectronic Engineering 159, pp. 198-201 (2016). 3. “Optimization of dielectric material stoichiometry for high-reliability capacitive MEMS switches”, IEEE Microwave and Wireless Components Letters 26 (3), pp. 174-176 (2016). 4. “Field emission in actuation pads of radio frequency microelectromechanical systems ohmic switches: A potential contamination mechanism”, Applied Physics Letters 108, 043506 (2016). 5. “Induced charging phenomena on SiNx dielectric films used in RF MEMS capacitive switches”. Microelectronics Reliability 55, pp. 1911-1915 (2015). 6. “Dielectric charging effects in floating electrode MEMS capacitive switches”. Microelectronics Reliability 55, pp. 1891-1895 (2015).  7. A MIM capacitor study of dielectric charging for RF MEMS capacitive switches”. Facta Universitatis, Series: Electronics and Energetics, Vol. 28, No 1, pp. 113-122 (2015). 8. “A study of deposition conditions on charging properties of PECVD silicon nitride films for MEMS capacitive switches”. Microelectronics Reliability 54, pp. 2159-2163 (2014). 9. Comparative study of AlN dielectric films’ electrical properties for MEMS capacitive switches”. Microelectronic Engineering 130, pp. 69-73 (2014). Next Page >>