National and Kapodistrian University of Athens
Semiconductor and Microsystems Laboratory
Solid State Physics Section
Department of Solid State Physics
Department of Solid State Physics, Faculty of Physics, University of Athens
University of Athens, School of Science, Faculty of Physics, Department of Solid State Physics, Contact, Maps
Penepistimiopolis Zografos, Athens 15784 | Phone: +30 210 7276-722 | Fax: +30 210 7276-711
Semiconducting
Materials
Semiconductor
Devices
MEMS
Nanocomposites
Reliability
Materials and
Transport parameters
Point defects
Dielectric films
Semiconducting materials
Point defects
This research activity aims to determine the presence
and characteristics of point defects in
* Bulk III-V semiconductors
* Epitaxial III-V semiconductors
* Silicon On Insulator (SOI) films
* Thin film polycrystalline Si
* 2-D electron gas heterostructure structures based on
III-V and III-N and dilute nitride semiconductors
* III-V, N-V, SOI and polycrystalline Si semiconductor
devices
* Radiation induced point and complex defects
Experimental setup
The assessment of point defects is achieved with Deep-Level-Tran-
sient-Spectroscopy (DLTS) method. The setup is based on a computer
controlled Boxcar averager that monitors simultaneously 8 rate windows,
stores the transients and the steady state value every 0.5 K.
The setup allows the recording of capacitance transients (C-DLTS),
current transients (I-DLTS) as well as the Photo-Induced-
Capacitance/Current transients (PICTS) with
the aid of LED and Laser optical sources.
In deails the expermental setup consists of:
* Keithley 487 pico-Amperemeter for the
current-voltage (I-V) characterization of P-N
and Schottky junctions
* Boonton 72B capacitance meter for C-
DLTS and Capacitance-Voltage
characterization
* Current amplifier with gain ranging from
102 to 107 V/A for I-DLTS
* Boxcar averager based on a National
Instruments DAQ card that allows the
simultaneous recording of 8 rate windows
and steady state value at any temperatu-re
* Liquid Nitrogen Biorad cryostat with
temperature controller that allows sample
assessment in the temprature range of 90K to
450K
* West Temperature controller with
controlled temperature ramp rate from 0.5
K/min to 100 K/min.
* All measurements are computer controlled
with Labview software.
DLTS setup
Biorad cryostat with sample in
DIL ceramic package and LED