National and Kapodistrian University of Athens
Semiconductor and Microsystems Laboratory
Solid State Physics Section
Department of Solid State Physics
Department of Solid State Physics, Faculty of Physics, University of Athens
University of Athens, School of Science, Faculty of Physics, Department of Solid State Physics, Contact, Maps
Penepistimiopolis Zografos, Athens 15784 | Phone: +30 210 7276-722 | Fax: +30 210 7276-711
Recent Journal publications
1. “Assessment of dielectric charging in capacitive MEMS switches fabricated on Si
substrate with thin oxide film”, Microelectronic Engineering 159, pp. 209-214 (2016).
2. “Conduction mechanisms in conductive multi-walled carbon nanotube filled
polydimethylsiloxane nanocomposites”, Microelectronic Engineering 159, pp. 198-201
(2016).
3. “Optimization of dielectric material stoichiometry for high-reliability capacitive MEMS
switches”, IEEE Microwave and Wireless Components Letters 26 (3), pp. 174-176 (2016).
4. “Field emission in actuation pads of radio frequency microelectromechanical systems
ohmic switches: A potential contamination mechanism”, Applied Physics Letters 108,
043506 (2016).
5. “Induced charging phenomena on SiNx dielectric films used in RF MEMS capacitive
switches”. Microelectronics Reliability 55, pp. 1911-1915 (2015).
6. “Dielectric charging effects in floating electrode MEMS capacitive switches”.
Microelectronics Reliability 55, pp. 1891-1895 (2015).
7. “A MIM capacitor study of dielectric charging for RF MEMS capacitive switches”. Facta
Universitatis, Series: Electronics and Energetics, Vol. 28, No 1, pp. 113-122 (2015).
8. “A study of deposition conditions on charging properties of PECVD silicon nitride films for
MEMS capacitive switches”. Microelectronics Reliability 54, pp. 2159-2163 (2014).
9. “Comparative study of AlN dielectric films’ electrical properties for MEMS capacitive
switches”. Microelectronic Engineering 130, pp. 69-73 (2014).
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